JPH0445082B2 - - Google Patents
Info
- Publication number
- JPH0445082B2 JPH0445082B2 JP13445286A JP13445286A JPH0445082B2 JP H0445082 B2 JPH0445082 B2 JP H0445082B2 JP 13445286 A JP13445286 A JP 13445286A JP 13445286 A JP13445286 A JP 13445286A JP H0445082 B2 JPH0445082 B2 JP H0445082B2
- Authority
- JP
- Japan
- Prior art keywords
- phase
- wavefronts
- birefringent element
- light
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 13
- 238000010008 shearing Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910021532 Calcite Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005492 condensed matter physics Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13445286A JPS62289704A (ja) | 1986-06-10 | 1986-06-10 | シアリング干渉コントラスト法段差測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13445286A JPS62289704A (ja) | 1986-06-10 | 1986-06-10 | シアリング干渉コントラスト法段差測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62289704A JPS62289704A (ja) | 1987-12-16 |
| JPH0445082B2 true JPH0445082B2 (en]) | 1992-07-23 |
Family
ID=15128672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13445286A Granted JPS62289704A (ja) | 1986-06-10 | 1986-06-10 | シアリング干渉コントラスト法段差測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62289704A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017012A (en) * | 1989-08-04 | 1991-05-21 | Chapman Instruments, Inc. | Viewing system for surface profiler |
| JP2546500B2 (ja) * | 1993-06-30 | 1996-10-23 | 日本電気株式会社 | 膜厚測定方法 |
| JPH1078648A (ja) * | 1996-09-04 | 1998-03-24 | Toshiba Corp | 位相シフトマスク検査装置 |
-
1986
- 1986-06-10 JP JP13445286A patent/JPS62289704A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62289704A (ja) | 1987-12-16 |
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